newscom. Its size even
allows multiple mounting configurations.

flatness egs


"This revolutionary new Omnitrac offers our customers a new, affordable
solution to a wide range of industrial applications ," said Product Manager
Aaron Sabino. API's experienced engineering
team is unmatched in its ability to create advanced innovative products
meeting the needs of rapid evolving industrial technologies .

autotech interferometry

Chapman's
system supports accelerating yield enhancement through a unique non-contact
thickness measurement at any location on the wafer.

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API products are installed and used by all of the world 's leading automotive,
aerospace, machine tool, and CMM manufacturers.

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The CP300i is our way of
introducing key customers in the semiconductor end user market to ZYGO.com/cgi-bin/prnh/20050808/DCM035 )
(Logo: http://www. Today,
that very same patented technology is present in over 1,000 trackers
worldwide. "Chapman Instruments has consistently been a leader, providing
non-contact surface topography instrumentation in the semiconductor industry
since 1989, with solutions to both wafer manufacturers and backend
semiconductor segments. As a specialist of premium
measurement equipment it is dedicated to developing and manufacturing
innovative, easy-to-use non-contact wafer inspection systems.

gauging polarimeters

PRESS RELEASE Zygo Corporation Receives Multiple Orders for Semiconductor Process Metrology Systems



Robert Stoner, ZYGO's vice president, metrology, made the following
comment, "ZYGO has long been a successful OEM supplier of precision optical
measuring systems to stepper manufacturers .

All statements other than statements of historical fact included in this
news release regarding our financial position, business strategy, plans,
anticipated growth rates, and objectives of management of the Company for
future operations are forward-looking statements. Among the
important factors that could cause actual events to differ materially from
those in the forward-looking statements are fluctuations in capital
spending of our customers, fluctuations in net sales to our major customer ,
manufacturing and supplier risks, dependence on new product development,
rapid technological and market change, risks in international operations,
dependence on proprietary technology and key personnel, length of the sales
cycle, environmental regulations, and stock price. Founded by Dr.


Chapman Instruments -- Beyond Measurement

About Chapman:
Chapman Instruments is a leading manufacturer of non-contact non-
destructive critical metrology measurement systems .

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API is a world leader of advanced metrology solutions for the industry.com


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newscom . With the need of only one operator to
transport, set up, and take precision measurements, the Omnitrac can
drastically increase the efficiency of part inspection, fixture building,
reverse engineering and many others., Chapman Instruments, a leading
global supplier of non-contact, non-destructive critical metrology measurement
system is honoured as a TIS Award winner at SEMICON West 2005 for its
exceptional contribution in the field of non-destructive thickness metrology.

digitizers steag

These systems are scheduled for
shipment within the next two quarters. See ZYGO's web
site at www.com for additional information.com/cgi-bin/prnh/20050422/DCF054LOGO-a )
Omnitrac is based on API's new Turbo ADM system which provides easy
operation with its extreme speed, and extensive range (a working envelope of
120 meters - the longest of its kind).com


Chapman Instruments'
products incorporate the company's patented dual beam laser technology,
providing remarkable accurate measurement capability on wafers and
accelerating a customer's return on its investment.

gaging egs

Whether it is mounted inside a
vehicle for inspection or upside down for equipment alignment, Omnitrac does
the job. ROCHESTER , N.

roughness ubm

Actual results could differ materially from those contemplated
by the forward-looking statements as a result of certain factors. Chapman is a
world-wide source for laboratories, R + D and in-line production for semi-
automated to fully automated surface profilers and future wafer thickness
systems . Chapman Instruments focuses on customer communication to assure
quality and innovation today as well as meeting future customer's need.

lmi autocollimators

zygo. "The Omnitrac makes the benefits of laser tracking systems
available to a new class of users who may not have been able to afford
traditional interferometer based instruments," Sabino states.
"On behalf of Chapman's employees, I am pleased to join TIS and selected
as a Winner," said Thomas C. TIS recognizes Chapman as an innovative manufacturer
and we are proud to join with other semiconductor companies in this award
program.

zigo icos

"

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut,
is a worldwide supplier of optical metrology instruments, precision optics,
and electro-optical design and manufacturing services, serving customers in
the semiconductor capital equipment and industrial markets.

Contact:
Aaron Sabino
Laser Tracker Product Manager
Automated Precision, Inc
(301) 330-8100
http://www.

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ROCKVILLE, Md.0kg and measuring 36cm in height, the Omnitrac is lighter
and more portable than many less accurate optical based systems.chapinst.

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"
Chapman's new thickness product offers the semiconductor industry both the
capability for today as well as future advanced semiconductor needs, offering
non-destructive solutions for semiconductor production and R+D.

roughness gauging

The Company had previously shipped
seven identical systems.
Kam Lau in 1987, API has pioneered progressively higher standards of accuracy
for coordinate measuring and machine tool operation.

zigo steag


Zygo Corporation (NASDAQ: ZIGO), a leading
worldwide optical metrology supplier, today announced that it received
follow-on orders for five CP300i advanced metrology systems from a major
customer in the semiconductor industry. It easily measures target locations in
constricted spaces also allowing programmable measurement routines for
unattended operation.

flatness polarimeters

Easier
to use than a total station and more affordable than a laser tracker, the
Omnitrac features a new high speed "Turbo" ADM system and high precision
encoders for long range measurements with an accuracy of 10ppm. Working with Boeing to
develop the first commercial laser tracker, API was granted the license to
tracker technology by NIST in 1988 and remains the exclusive licensee.
TIS recognizes innovative products which are new inventions and provide
practical solutions to real problems in the semiconductor and /or related
industries.

Contact:
Chapman Instruments
Traudi Mollner
3 Townline Circle
Rochester, NY 14623-2537
United States of America
Phone: (585) 424 1380
Fax: (585) 424 2142
http: //www.

video, laser scanners, etc).

tonananlagen gaging

The systems are deployed in 24/7 production facilities around
the world.

g.

gauging welds

These techniques were recently
developed by ZYGO specifically to enable its customers in the semiconductor
and flat panel display industries to perform complex process control
measurements of parameters, such as film thickness, pattern overlay, and
step height. It
is the first of several novel instruments we plan to develop and release
into this market over the next three years. Further information on
potential factors that could affect Zygo Corporation's business is
described in our reports on file with the Securities and Exchange
Commission, including our Form 10-K for the fiscal year ended June 30,
2005.


(Photo: http://www.

Chapman Instruments is a SEMI TIS Award winner

Bristow, CEO and President of Chapman
Instruments.Mollner@chapinst.

Metrology systems/companies which rely on non-contact methods to make measurements (e.

spg tonananlagen

New Omnitrac ADM Laser Station Targets Value and Performance

zygo micrometers

interferometry zigo

It uses proprietary optical imaging
and analysis techniques which enable engineers and operators to measure 2-
and 3-dimensional structures on 300 mm wafers and chip packages at high
speed, and with subnanometer precision. These multi-tool orders signal
the beginning of what we believe will be an important new growth
opportunity for the Company.
Weighing only 8. The TIS award acknowledges Chapman's innovative solutions and
pursuit of non-contact and non -destructive metrology equipment to the
semiconductor industry.

egs gauging

Forward-looking
statements are intended to provide management's current expectations or
plans for the future operating and financial performance of the Company
based upon information currently available and assumptions currently
believed to be valid., After a successful unveiling at the
CMSC in Austin, TX, Automated Precision, Inc officially launched the newest
portable CMM in the metrology market: the Omnitrac ADM laser station.Y.com
E-Mail: Traudi.

gauging gaging



The CP300i is the latest in ZYGO's established line of automated ultra high
precision optical surface profilers. Forward-looking statements can be identified by the
use of words such as "anticipate," "believe," "estimate," "expect,"
"intend," "plans," "strategy," "project ," and other words of similar
meaning in connection with a discussion of future operating or financial
performance.apisensor.

gaging roughness

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